Series RX 3000 UHP Regulator
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Rotarex
Series RX 3000 UHP Regulator
Model RX3000 · Ultra High Purity Gas Regulators
Single stage diaphragm Cv 0.09 and 0.15. Inlet 21/240 bar.
Maximum Inlet Pressure21 / 240 bar versions
Setting Range0.7 / 2 / 4 / 7 / 10 / 21 bar versions
In/Out Connections1/4 in VCR male or female, 2, 3 or 4 port bodies
Key features
- Single stage free diaphragm UHP regulator
- Threadless body design
- 21 and 240 bar inlet versions
- Outlet versions from 0.7 to 21 bar
- Cleanroom assembled, serial numbered
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Technical selection support before you order
A single stage free diaphragm regulator for high purity and ultra high purity gas systems, built on Rotarex's threadless body design. Versions cover 21 bar and 240 bar inlets with outlet pressures from 0.7 up to 21 bar, and the two flow capacities, Cv 0.09 and 0.15, are the smaller sizes in the RX family. Each unit is assembled, tested and packaged in an ISO Class 4 cleanroom and carries its own serial number for full traceability. The RX 3200 is the tied diaphragm version of the same platform.
Specification
| Maximum Inlet Pressure | 21 / 240 bar versions |
|---|---|
| Setting Range | 0.7 / 2 / 4 / 7 / 10 / 21 bar versions |
| In/Out Connections | 1/4 in VCR male or female, 2, 3 or 4 port bodies |
| Stages | single stage |
| Temperature | -20 to +65 C |
| Cv | 0.09 or 0.15 |
| Body Material | AISI 316L stainless steel to SEMI F20 |
| Technology | free diaphragm |
| Seat Material | PCTFE (polyimide optional) |
Gases
Hydrogen
