Series RX 3000 UHP Regulator
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Rotarex
Series RX 3000 UHP Regulator
Model RX3000 · Ultra High Purity Gas Regulators
Single stage diaphragm Cv 0.09 and 0.15. Inlet 21/240 bar.
Maximum Inlet Pressure21 / 240 bar versions
Setting Range0.7 / 2 / 4 / 7 / 10 / 21 bar versions
In/Out Connections1/4 in VCR male or female, 2, 3 or 4 port bodies
Key features
- Single stage free diaphragm UHP regulator
- Threadless body design
- 21 and 240 bar inlet versions
- Outlet versions from 0.7 to 21 bar
- Cleanroom assembled, serial numbered
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Technical selection support before you order
A single stage free diaphragm regulator for high purity and ultra high purity gas systems, built on Rotarex's threadless body design. Versions cover 21 bar and 240 bar inlets with outlet pressures from 0.7 up to 21 bar, and the two flow capacities, Cv 0.09 and 0.15, are the smaller sizes in the RX family. Each unit is assembled, tested and packaged in an ISO Class 4 cleanroom and carries its own serial number for full traceability. The RX 3200 is the tied diaphragm version of the same platform.
Specification
| Maximum Inlet Pressure | 21 / 240 bar versions |
|---|---|
| Setting Range | 0.7 / 2 / 4 / 7 / 10 / 21 bar versions |
| In/Out Connections | 1/4 in VCR male or female, 2, 3 or 4 port bodies |
| Stages | single stage |
| Temperature | -20 to +65 C |
| Cv | 0.09 or 0.15 |
| Body Material | AISI 316L stainless steel to SEMI F20 |
| Technology | free diaphragm |
| Seat Material | PCTFE (polyimide optional) |
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Common questions
- When is the RX 3000 the right choice rather than the RX 4000?
- For the lower flows. The RX 3000 comes in Cv 0.09 and 0.15, the two smallest sizes in the RX family, with 21 bar or 240 bar inlets and outlet versions from 0.7 to 21 bar. The RX 4000 starts at Cv 0.15 and runs to 1.1, but its outlet versions stop at 10 bar. If the point of use needs a small, steady flow at anything up to 21 bar, the RX 3000 fits; for a higher flow the RX 4000 does.
- Is a single stage regulator enough on a UHP cylinder supply?
- Often, yes. A single stage regulator holds its setting well on a steady inlet, and as the cylinder empties the outlet moves a little: on the RX 3000, 0.25 bar for every 100 bar the inlet changes on the Cv 0.09 version and 0.5 bar on the Cv 0.15. Where the process cannot take that, a second regulator downstream holds the final pressure; where it can, the RX 3000 on its own is the simpler choice.
- What is the difference between the RX 3000 and the RX 3200?
- The diaphragm design. The RX 3000 is a free diaphragm regulator: the diaphragm and the poppet are separate parts, with a spring in the gas path, and that design suits inert and non-reactive gases. The RX 3200 is the tied diaphragm version on the same threadless body: the poppet is linked to the diaphragm, there is no spring in the gas and the seat closes positively, which is what toxic, corrosive and flammable gases call for. Its outlet versions stop at 7 bar.
