Series RX 3200 Regulator
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Rotarex
Series RX 3200 Regulator
Model RX3200 · Ultra High Purity Gas Regulators
Single stage tied-diaphragm, Cv 0.09, 0.15, Inlet 21/240 bar
Maximum Inlet Pressure21 / 240 bar versions
Setting Range0.7 / 2 / 4 / 7 bar versions
In/Out Connections1/4 in VCR male or female, 2, 3 or 4 port bodies
Key features
- Tied diaphragm with springless design
- Inlet versions of 21 and 240 bar
- Outlet versions 0.7 to 7 bar
- AISI 316L body to SEMI F20
- Sub-atmospheric variant available as the RX 3100
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Technical selection support before you order
A single stage regulator pairing the threadless RX body with a tied diaphragm and a springless mechanism, for high purity and ultra high purity duty. Inlet versions are 21 and 240 bar, outlet pressures run 0.7, 2, 4 and 7 bar, and flow capacity is Cv 0.09 or 0.15. Materials follow the UHP pattern of the range, an AISI 316L body to SEMI F20 with a PCTFE seat, and every unit is cleanroom assembled and serial numbered. A sub-atmospheric version exists as the RX 3100.
Specification
| Maximum Inlet Pressure | 21 / 240 bar versions |
|---|---|
| Setting Range | 0.7 / 2 / 4 / 7 bar versions |
| In/Out Connections | 1/4 in VCR male or female, 2, 3 or 4 port bodies |
| Stages | single stage |
| Temperature | -20 to +65 C |
| Cv | 0.09 or 0.15 |
| Body Material | AISI 316L stainless steel to SEMI F20 |
| Technology | tied diaphragm, springless |
| Seat Material | PCTFE (polyimide optional) |
Gases
Hydrogen
