Ultra High Purity Line Valves

Springless diaphragm line valves for ultra high purity gas systems, in a range of flow capacities and connection sizes. Rotarex UHP valves are built and packaged for semiconductor and analytical grade gas delivery where any contamination or particle generation from the valve itself is unacceptable.

Pick by flow and pressure together. The RX 04 and RX 08 carry the 240 bar versions, with 4 mm and 8 mm seats and Cv 0.2 and 0.5. The RX M12 and RX M20 are the 15 bar valves for higher flow, 12 mm and 20 mm seats with Cv 1.75 and 3.5. Hand or pneumatic operation and the connection size then follow from the panel.

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Common questions

How does a diaphragm line valve work?
The stem presses a thin metal diaphragm onto a seat to close the flow, and the diaphragm springs back to open it. The gas touches only the body, the seat and the diaphragm, so the internal volume is very small and nothing rubs in the gas path to generate particles. In this range the diaphragm is Phynox and the wetted volume is under 1.2 cubic centimetres on the smallest valve.
What does springless mean on an ultra high purity valve?
There is no spring in the gas path holding the seat closed. The diaphragm itself provides the closing force. That removes a wearing part, removes a place where particles can be generated and shed into the gas, and keeps the internal volume down. It is one of the design differences that separates an ultra high purity valve from an ordinary line valve.
What is the burst pressure of these valves?
Above 700 bar across the range, against working inlet pressures of 240 bar on the 4 mm and 8 mm valves and 15 bar on the larger 12 mm and 20 mm valves. Burst pressure is a destructive test figure and is not a working rating. The inlet pressure on the product page is the figure to design a system to.

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