Series RX 3100 Sub-atmospheric Regulator
Request a quote
Rotarex
Series RX 3100 Sub-atmospheric Regulator
Model RX3100 · Ultra High Purity Gas Regulators
Sub-atmospheric regulator Cv 0.09. Inlet 21 bar.
Maximum Inlet Pressure21 bar
Setting Range120 mbar absolute to 0.7 bar, or 120 mbar absolute to 2 bar
In/Out Connections1/4 in VCR male or female, 2, 3 or 4 port bodies
Key features
- Outlet control below atmosphere, from 120 mbar absolute
- Springless tied diaphragm mechanism
- Electropolished finishes to SEMI F19 UHP grade
- Flow capacity Cv 0.09
Enquire about this product
Priced to your specification. Most enquiries are answered the same working day.
Request a quoteDownload data sheetUK stock and next-day dispatch on held lines
Technical selection support before you order
A sub-atmospheric regulator that controls outlet pressure below atmosphere, from 120 mbar absolute up to 0.7 or 2 bar depending on version, with a 21 bar maximum inlet. The tied diaphragm mechanism is springless, electropolished surface finishes to SEMI F19 UHP grade are available, and assembly, testing and packaging happen in an ISO Class 4 cleanroom with a serial number on every unit. Flow capacity is Cv 0.09. It is the sub-atmospheric counterpart of the RX 3200, and the RX 4100 offers the same duty at Cv 0.5.
Specification
| Maximum Inlet Pressure | 21 bar |
|---|---|
| Setting Range | 120 mbar absolute to 0.7 bar, or 120 mbar absolute to 2 bar |
| In/Out Connections | 1/4 in VCR male or female, 2, 3 or 4 port bodies |
| Temperature | -20 to +65 C |
| Cv | 0.09 |
| Body Material | AISI 316L stainless steel (SEMI F20 option) |
| Technology | tied diaphragm, springless |
| Seat Material | PCTFE (PTFE or polyimide optional) |
Gases
Hydrogen
