Ultra high purity tied diaphragm cylinder valves in the Rotarex D3 series: manual and pneumatic, single and dual port, metal to metal or soft seat, orifice sizes from 4 mm to 8 mm, with variants for fluorine mixes and low pressure service. Built for the highest purity cylinder gases.
Four decisions. Orifice: 4 mm on the standard high pressure valves, 6 mm for higher flow, 8 mm on the 45 bar low pressure valves. Seat: soft seat as standard, or metal to metal on the D306 and D356 for highly oxidising and reactive gases. Actuation: manual, pneumatic or oleo pneumatic. Ports: the dual port valves serve liquefied gas withdrawal. Fluorine mixes have their own valve, the D386S.
Ultra high purity tied diaphragm seal type
D304 valve for UHP, corrosive, reactive and toxic gases from Rotarex Puretec is designed for keeping the highest level of purity of the gas. No particles are generated in the gas wetted part thanks to the tied diaphragm technology. It is also available with the new Open/close indicator from Rotarex Puretec
Ultra high purity tied diaphragm seal type
D385S valve with pneumatic actuator is designed for keeping the highest level of purity of the gas. Its tied diaphragm technology allows to avoid any particle generation. The D385S is used for UHP, corrosive, reactive and toxic gases, common in the electronic and semicondutor industry.
Ultra high purity tied diaphragm seal type
The D386S ensures the highest levels of purity and safety for applications using fluorine gas mixtures, such as cleaning non-plasma deposition chambers and diffusion furnaces for silicon-based films. Designed with the challenges of fluorine-nitrogen mixtures in mind, this UHP cylinder valve incorporates specialized features to enhance operational safety and maintain the purity of F₂/N₂ mixtures, supporting contamination-free manufacturing
Ultra high purity tied diaphragm seal type
D354 valve with oleo-pneumatic actuator is designed for keeping the highest level of gas purity. No particle are generated thanks to its tight diaphragm technology. Commonly used for ultra-high-purity, corrosive, reactive and toxic gases, its oleo-pneumatic actuator increase the seat closure force.
Ultra high purity tied diaphragm seal type
D340S valve for Ultra-High Purity gases from Rotarex Puretec is designed for keeping the highest level of purity of the gas. The dual port technology ease withdrawal of liquefied gas by pressurizing through vapour port. No particles are generated in the gas wetted part thanks to the tied diaphragm technology.
Ultra high purity tied diaphragm seal type
D306 cylinder valve for Ultra High Purity highly oxidizing and reactive gases is designed for keeping the highest level of gas purity, thanks to its tied diaphragm technology. The Rotarex Puretec D306 UHP cylinder valve is also available with the new Open/close indicator.
Ultra high purity tied diaphragm seal type
The D356 UHP cylinder valve with oleo-pneumatic actuator is designed for Ultra High Purity highly oxidizing and reactive gases, ensuring the highest level of gas purity thanks to its tied diaphragm technology. Its oleo-pneumatic actuator increases the seat closure force for maximum safety.
Ultra high purity tied diaphragm seal type
D339S valve is designed for keeping the highest level of purity of UHP, corrosive, reactive and toxic gases. No particles are generated in the gas wetted part thanks to the tied diaphragm technology. The D339S is also available with the new Open/close indicator from Rotarex Puretec.
Ultra high purity tied diaphragm seal type
D389S UHP cylinder is designed for keeping the highest level of purity of the gas. The seat closure force is increased thanks to its oleo-pneumatic actuator. The tight diaphragm technology allows no particle are generation in the gas wetted parts.
Ultra high purity tied diaphragm seal type
D349 valve for UHP gases is designed for keeping the highest level of purity of the gas. Easy withdrawal of liquefied gas thanks to the dual port technology. The D349 allows a high flow value at high pressure with its 6mm orifice size.
Ultra high purity tied diaphragm seal type
D337 low pressure manual cylinder valve for Ultra High Purity, corrosive, reactive and toxic gases is designed for keeping the highest level of purity of the gas, thanks to the tied diaphragm technology. The D337 valve is also available with the Rotarex puretec Open/close indicator for an improved safety.
Ultra high purity tied diaphragm seal type
D387 low pressure pneumatic cylinder valve for UHP, corrosive, reactive and toxic gases is designed with the tied-diaphragm in order to keep the highest level of purity of the gas. Its 8mm orifice size allows a high CV value.
Ultra high purity tied diaphragm seal type
D342 low pressure valve for Ultra-High Purity corrosive, reactive and toxic gases is designed for keeping the highest level of purity of the gas, thanks to the tied diaphragm technology. The D342 dual ported valve has two outlets marked “LIQUID” to withdraw liquid phase and “VAPOR” for gas phase.
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