4100 Sub-atmospheric Regulator.
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Rotarex
4100 Sub-atmospheric Regulator.
Model RX4100 · Ultra High Purity Gas Regulators
Sub-atmospheric regulator Cv 0.5. Inlet 21 bar.
Maximum Inlet Pressure21 bar
Setting Range120 mbar absolute to 0.7 bar, or 120 mbar absolute to 2 bar
In/Out Connections1/4 or 1/2 in VCR male or female, 2, 3 or 4 port bodies
Key features
- Sub-atmospheric control at Cv 0.5
- From 120 mbar absolute at the outlet
- Springless tied diaphragm
- Connections to 1/2 inch VCR
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Technical selection support before you order
A sub-atmospheric regulator sized for higher flows, carrying Cv 0.5 against the RX 3100's 0.09, with outlet control from 120 mbar absolute up to 0.7 or 2 bar and a 21 bar maximum inlet. The tied diaphragm mechanism is springless, and electropolished surface finishes to SEMI F19 UHP grade are available. Connections run to 1/2 inch VCR as well as 1/4 inch. Like the rest of the range it is assembled, tested and packaged in an ISO Class 4 cleanroom, with a serial number on each unit.
Specification
| Maximum Inlet Pressure | 21 bar |
|---|---|
| Setting Range | 120 mbar absolute to 0.7 bar, or 120 mbar absolute to 2 bar |
| In/Out Connections | 1/4 or 1/2 in VCR male or female, 2, 3 or 4 port bodies |
| Temperature | -20 to +65 C |
| Cv | 0.5 |
| Body Material | AISI 316L stainless steel (SEMI F20 option) |
| Technology | tied diaphragm, springless |
| Seat Material | PCTFE (polyimide optional) |
Gases
Hydrogen
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