D386S Tied diaphragm cylinder valve for fluorine mixtures with pneumatic actuator
The D386S ensures the highest levels of purity and safety for applications using fluorine gas mixtures, such as cleaning non-plasma deposition chambers and diffusion furnaces for silicon-based films. Designed with the challenges of fluorine-nitrogen mixtures in mind, this UHP cylinder valve incorporates specialized features to enhance operational safety and maintain the purity of F₂/N₂ mixtures, supporting contamination-free manufacturing
Key features
- Built for fluorine gas mixtures
- 4.5 mm orifice, 200 bar, Cv 0.25
- Tied diaphragm, minimal wetted volume
- Bodies in 316L, Hastelloy, Nickel or Monel
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Request a quoteA tied diaphragm cylinder valve built for fluorine gas mixtures, the kind used to clean deposition chambers, where purity and safety both depend on the valve. Rated 200 bar with a 4.5 mm orifice and Cv 0.25, it carries the family's minimal gas wetted volume, combined soft and metal seat and thread free wetted path, with mechanically linked spindles for positive operation and a threaded weep hole for leak testing. Bodies in AISI 316L, Hastelloy C22, Nickel 200 or Monel, optional pressure relief device, marked to TPED.
Specification
| Orifice | 4.5 mm |
|---|---|
| Maximum Inlet Pressure | 200 bar |
| In/Out Connections | to national or international standards and customer specification |
| Cv | 0.25 |
| Temperature | -40 to +65 C without pressure relief device |
| Body Material | AISI 316L stainless steel, Hastelloy C22, Nickel 200 or Monel by version |
| Technology | tied diaphragm cylinder valve for fluorine mixtures |
Gases
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