RX 04 HP & UHP Line Valve
Flow capacity 0.2 springless diaphragm.
Key features
- 4 mm seat, Cv 0.2, wetted volume under 1.2 cm3
- 20 to 240 bar, manual or pneumatic
- Reverse seat design for long cycle life
- Burst pressure above 700 bar
- Helium leak rates 1 x 10-9 or better
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Request a quoteDownload data sheetA compact diaphragm line valve for high purity and ultra high purity gas, with a 4 mm seat, Cv 0.2 and less than 1.2 cm3 of wetted volume. Versions run from 20 bar to 240 bar with multiturn or quarter turn handwheels, and pneumatic versions at 10, 20 and 240 bar. A reverse seat design gives long cycle life, every valve is helium leak tested with all three leak rates at 1 x 10-9 mbar.l/s or better, assembled in an ISO Class 4 cleanroom and serial numbered, with a burst pressure above 700 bar. AISI 316L body with SEMI F20 option, Phynox diaphragm, seat in PCTFE to 65 C or polyimide to 150 C, electropolished to SEMI F19 UHP grade, with multi port, panel mount, lockout and constant bleed options.
Specification
| Orifice | 4 mm seat |
|---|---|
| Maximum Inlet Pressure | 20 or 240 bar manual versions, 10, 20 or 240 bar pneumatic versions |
| In/Out Connections | face seal female or male, butt weld, compression tube fittings, 1/4 in |
| Cv | 0.2 |
| Temperature | -40 to +65 C with PCTFE seat, -40 to +150 C with polyimide |
| Body Material | AISI 316L stainless steel, SEMI F20 option |
| Seat Material | PCTFE or polyimide |
| Diaphragm | Phynox |
| Technology | diaphragm line valve, multiturn, quarter turn or pneumatic |
