RX 04 HP & UHP Line Valve
Flow capacity 0.2 springless diaphragm.
Key features
- 4 mm seat, Cv 0.2, wetted volume under 1.2 cm3
- 20 to 240 bar, manual or pneumatic
- Reverse seat design for long cycle life
- Burst pressure above 700 bar
- Helium leak rates 1 x 10-9 or better
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Request a quoteDownload data sheetA compact diaphragm line valve for high purity and ultra high purity gas, with a 4 mm seat, Cv 0.2 and less than 1.2 cm3 of wetted volume. Versions run from 20 bar to 240 bar with multiturn or quarter turn handwheels, and pneumatic versions at 10, 20 and 240 bar. A reverse seat design gives long cycle life, every valve is helium leak tested with all three leak rates at 1 x 10-9 mbar.l/s or better, assembled in an ISO Class 4 cleanroom and serial numbered, with a burst pressure above 700 bar. AISI 316L body with SEMI F20 option, Phynox diaphragm, seat in PCTFE to 65 C or polyimide to 150 C, electropolished to SEMI F19 UHP grade, with multi port, panel mount, lockout and constant bleed options.
Specification
| Orifice | 4 mm seat |
|---|---|
| Maximum Inlet Pressure | 20 or 240 bar manual versions, 10, 20 or 240 bar pneumatic versions |
| In/Out Connections | face seal female or male, butt weld, compression tube fittings, 1/4 in |
| Cv | 0.2 |
| Temperature | -40 to +65 C with PCTFE seat, -40 to +150 C with polyimide |
| Body Material | AISI 316L stainless steel, SEMI F20 option |
| Seat Material | PCTFE or polyimide |
| Diaphragm | Phynox |
| Technology | diaphragm line valve, multiturn, quarter turn or pneumatic |
Downloads
Common questions
- What is the difference between the RX 04 and the RX 08 line valves?
- The seat and the line size. The RX 04 has a 4 mm seat with Cv 0.2 and under 1.2 cm3 of wetted volume, on 1/4 inch or 6 mm ends; the RX 08 has an 8 mm seat with Cv 0.5 and under 1.6 cm3, on 3/8 or 1/2 inch, 10 or 12 mm ends. The build is shared: the 316L body, the Phynox diaphragm, the reverse seat design, helium leak testing at 1 x 10-9 mbar.l/s or better and cleanroom assembly. Choose by the flow and the tube size: the RX 04 for the lower flows, the RX 08 where the line has to carry more.
- Which pressure ratings and actuators can the RX 04 be ordered with?
- Manual versions are rated 20 bar or 240 bar, with a multiturn or a quarter turn handwheel. Pneumatic versions come at 10, 20 or 240 bar. Burst pressure is above 700 bar on all of them. Options include multi port bodies, panel mounting, a lockout and a constant bleed version, and the end connections are 1/4 inch face seal male or female, butt weld or compression tube fittings.
- Which seat material should I specify, PCTFE or polyimide?
- A PCTFE seat is rated from minus 40 to plus 65 C, or from minus 20 C on the pneumatic versions, which suits lines at ambient temperature. Polyimide takes the valve to 150 C for heated lines. Both sit on the same reverse seat design, and the wetted surfaces are electropolished to the SEMI F19 ultra high purity grade, with a SEMI F20 body option.
