RX M12 HP & UHP Line Valve
Flow capacity 1.75 springless diaphragm.
Key features
- 12 mm seat, Cv 1.75, for 1/2 to 3/4 inch lines
- 15 bar, multiturn or pneumatic
- Optional purge ports, replaceable seat
- Burst pressure above 700 bar
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Request a quoteDownload data sheetA 12 mm seat diaphragm line valve for high purity and ultra high purity distribution in 1/2 to 3/4 inch lines, with Cv 1.75, less than 7 cm3 of wetted volume and a 15 bar rating in both multiturn and pneumatic versions. Optional purge ports give excellent purgeability, the seat is replaceable, and every valve is helium leak tested to 1 x 10-9 mbar.l/s or better, assembled in an ISO Class 4 cleanroom and serial numbered, with a burst pressure above 700 bar. AISI 316L body with SEMI F20 option, Phynox diaphragm, seat in PCTFE to 65 C or polyimide to 150 C, electropolished to SEMI F19 UHP grade with finishes down to Ra 0.13 micron.
Specification
| Orifice | 12 mm seat |
|---|---|
| Maximum Inlet Pressure | 15 bar |
| In/Out Connections | 1/2 to 3/4 in, face seal, butt weld or compression fittings |
| Cv | 1.75 |
| Temperature | -40 to +65 C with PCTFE seat, -40 to +150 C with polyimide |
| Body Material | AISI 316L stainless steel, SEMI F20 option |
| Seat Material | PCTFE or polyimide, replaceable |
| Diaphragm | Phynox |
| Technology | diaphragm line valve, multiturn or pneumatic |
