RX 08 HP & UHP Line Valve
Flow capacity 0.5 springless diaphragm.
Key features
- 8 mm seat, Cv 0.5, wetted volume under 1.6 cm3
- 20 or 240 bar, manual or pneumatic
- Reverse seat design for long cycle life
- Burst pressure above 700 bar
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Request a quoteDownload data sheetThe 8 mm seat member of the RX diaphragm line valve range for high purity and ultra high purity gas, with Cv 0.5 and less than 1.6 cm3 of wetted volume. Versions run 20 bar and 240 bar with multiturn or quarter turn handwheels or pneumatic actuation, all helium leak tested to 1 x 10-9 mbar.l/s or better on outboard, inboard and across the seat, assembled in an ISO Class 4 cleanroom, serial numbered, with a burst pressure above 700 bar. Reverse seat design for long cycle life, AISI 316L body to SEMI F20, Phynox diaphragm, PCTFE or polyimide seat, gas wetted finish to SEMI F19 grades, with multi port, panel mount, lockout and position switch options.
Specification
| Orifice | 8 mm seat |
|---|---|
| Maximum Inlet Pressure | 20 or 240 bar |
| Cv | 0.5 |
| Temperature | -40 to +65 C with PCTFE seat, -40 to +150 C with polyimide |
| Body Material | AISI 316L stainless steel to SEMI F20 |
| Seat Material | PCTFE or polyimide |
| Diaphragm | Phynox |
| Technology | diaphragm line valve, multiturn, quarter turn or pneumatic |
